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Extreme Ultraviolet Lithography
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About the Author
Banqiu Wu, Ph.D., is Chief Technology Officer, Mask Products Division, Applied Materials, Inc. Ajay Kumar, Ph.D., is General Manager, Cleans and Mask Products Business Group, Applied Materials, Inc.
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Product details
Hardcover: 482 pages
Publisher: McGraw-Hill Education; 1 edition (April 24, 2009)
Language: English
ISBN-10: 9780071549189
ISBN-13: 978-0071549189
ASIN: 0071549188
Product Dimensions:
6.4 x 1.2 x 9.4 inches
Shipping Weight: 1.7 pounds (View shipping rates and policies)
Average Customer Review:
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Amazon Best Sellers Rank:
#5,104,409 in Books (See Top 100 in Books)
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